Integrated thin-film resistor with direct contact

ABSTRACT

A BEOL thin-film resistor adapted for flexible integration rests on a first layer of ILD. The thickness of the first layer of ILD and the resistor thickness combine to match the nominal design thickness of vias in the layer of concern. A second layer of ILD matches the resistor thickness and is planarized to the top surface of the resistor. A third layer of ILD has a thickness equal to the nominal value of the interconnections on this layer. *Dual damascene interconnection apertures and apertures for making contact with the resistor are formed simultaneously, with the etch stop upper cap layer in the resistor protecting the resistive layer while the vias in the dual damascene apertures are formed.

TECHNICAL FIELD

The field of the invention is that of forming thin film resistors in theback end of an integrated circuit in a process integrated with theremainder of the back end process.

BACKGROUND OF THE INVENTION

Workers in the field of integrated circuits have long fabricatedthin-film resistors in the back end of an integrated circuit. Incontrast to resistors located in the silicon substrate of the circuit,which suffer from relatively large parasitic capacitance to thesubstrate, back end resistors have much less parasitic capacitance,since they are placed vertically above the substrate. Hence, back end ofthe line (BEOL) resistors are ideal for high frequency RF circuitryapplications.

BEOL thin-film resistors are deposited in layers of a material of knownresistivity and having a well controlled thickness and thereforeinherently have more accurate resistance values than front end resistorsthat are implanted in the substrate or polysilicon layer and annealedsubsequently using rapid thermal annealing processing. The accuracy ofthe front end resistor is limited due to the inherit variations inthermal temperature control and ion implantation processing.

It is not enough that the resistor is fabricated with the benefitsrecited above, however. The process of forming the resistor must beintegrated into the overall back end process. If the resistor had to beformed using a series of steps that were different from other steps informing the back end, the cost of forming a resistor would be excessive.

In earlier and current work, e.g. the 180 nm node and above, integrationof thin film resistors was straightforward. As the technology advancesto the 90 nm node and then to the 65 nm and 45 nm nodes, however,integration will become more difficult because the thickness of thelayers in the back end will decrease, making integration progressivelymore difficult.

The art could benefit from an integrated process for forming a thin-filmresistor in the back end of an integrated circuit that is effective forthin layers of interlevel dielectric (ILD) in the back end structure.

SUMMARY OF THE INVENTION

A feature of the invention is the formation of a thin-film resistor inthe back end of an integrated circuit in an integrated process in whichan interconnect member in the same level as the resistor makes contactwith the resistive element of the resistor.

Another feature of the invention is that the metal wire makes directcontact with the resistive element through a dual damascene processduring BEOL processing and hence the current carrying capability ofresistor is not limited by the contacts.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a portion of the back end of an integrated circuit with anunpatterned layer of resistor material.

FIG. 2 shows the same region after patterning the resistor to thedesired dimension.

FIG. 3 shows the resistor covered by a first layer of dielectric.

FIG. 4 shows the resistor before chemical-mechanical polishing.

FIG. 5 shows the resistor after polishing and deposition of a secondlayer of dielectric.

FIG. 6 shows the resistor after formation of contacts.

DETAILED DESCRIPTION

FIG. 1 shows a portion of the back end of an integrated circuit after anumber of preliminary steps including preparing a substrate 10, e.g.silicon; forming transistors in the substrate, and first levelinterconnects 21 embedded in dielectric 20, illustratively SiO2 (oxide).

A dielectric cap 22, illustratively SiC or Si3N4 (nitride) has beendeposited over the first dielectric 20 as an etch stop and/or polishstop. Lower metal interconnections 34 are embedded in dielectric 20.Another cap layer 32 has been deposited on the top surface of lowerlayer ILD 30.

These illustrations are in the context of a dual-damascene technique forforming back end wiring, in which the interconnections in a layer of theback end are formed in two sub-layers: a lower layer of isolated viasextending down to make contact with lower layers and an upper sub-layerof interconnects extending at some length to make contact with otherportions of the circuit. In some cases, as in layer 30, theinterconnects may extend through the entire depth of the ILD.

At the top of FIG. 1, a set of resistor layers 42, 44, and 46, togetherhaving a resistor thickness, has been deposited on top of a firstInter-Level Dielectric (ILD) 40 by any convenient method such aschemical Vapor Deposition (CVD) or sputtering. Lower cap layer 42 andtop cap layer 46, which do not need to be the same material, areillustratively formed of CVD deposited SiCr and layer 44 is formedillustratively of sputtered TaN. Those skilled in the art will be ableto substitute other materials having suitable properties.

FIG. 2 shows the same area after the resistive and cap layers, denotedcollectively by bracket 48, have been defined by conventional etchingsteps to the size and shape required by the circuit designer.

On the right side of FIG. 2, box 130 represents schematically theremainder of the integrated circuit, including other interconnections onthe same level as the resistor being fabricated.

FIG. 3 shows the area after deposition of a (filler) second ILD layer 50that covers the resistor 48. This layer 50 has a second ILD thicknessnominally equal to the resistor thickness and will be planarized by anyconvenient technique such as chemical-mechanical polishing (CMP) to thetop surface of resistor 48.

FIG. 4 shows the area after planarization to line 52 at the top surfaceof resistor 48.

FIG. 5 shows the area after the subsequent deposition of third ILD layer54. The combined thickness of layers 40 and 50 is chosen to besubstantially equal to the depth of a via in this layer. The thicknessof layer 54 is chosen to be substantially equal to the thickness of theinterconnections on this layer. Those skilled in the art will be awarethat the thickness of layers in the back end is not necessarily the sameon each level. The thicknesses referred to are those that the circuitdesigner has chosen for this particular integrated circuit (or for thetechnology used for this type of integrated circuit).

FIG. 6 shows the area after formation of interconnect apertures in thecombined ILD (40, 50 and 54) containing the resistor. On the left of theFigure, dual damascene interconnect 58 has at the bottom via 59 thatextends downward to make contact with interconnect 34 of the lowerlayer. Liner 55 is a conventional liner for preventing diffusion.Illustratively, the conductive material in the interconnects is copper.The sequence of forming the structure shown in this Figure issimultaneously etching metal interconnects 56 and 58, stopping on etchstop (top cap) layer 46. In a later step, a different etch chemistrywill be used to etch through layers 32 and 46 simultaneously. Next, vias59 are etched at the bottom of interconnect 58, stopping on layer 32,while etch stop layer 46 prevents the etch chemistry from penetratinglayer 46 to damage layer 44. When the via 59 has reached layer 32 (plusthe usual overetch) a different chemistry is used to clean out layers 46and 32, so that the bottom of via 59 exposes lower interconnect 34 andthe bottom of interconnect 56 exposes layer 44. For the purposes of thepresent invention, it does not matter if vias 59 are etched beforeinterconnects 58 (a via-first method), with the expansion of the upperportion of the via to make interconnects 58 and 56.

Advantageously, the thickness of layers 40 and 50 combine to match thedesign thickness of via 59. Similarly, the thickness of layer 54 matchesthe design thickness of interconnect 58. This direct contact between theinterconnect and the resistive material 44 is advantageous in that it ismore reliable than having a via make the connection to the resistivelayer. Interconnnects 56 are shown as being deeper than interconnects 58because interconnects 56 have the additional step of etching through thecap layer 46.

In a particular example, the material of ILDs 40, 59 and 54 is acombination of fluorinated silicate glass (FSG), hydrogenated oxidizedsilicon carbon material (SiCOH), and/or organsilicate glass (OSG). Theetch used to cut through layer 46 is a conventional silicon nitride orSiC film plasma RIE etch process using fluorine based chemistry.

Preferably, the area in layer 30 under the BEOL resistor in empty inorder to avoid coupling from the resistor.

While the invention has been described in terms of a single preferredembodiment, those skilled in the art will recognize that the inventioncan be practiced in various versions within the spirit and scope of thefollowing claims.

1. A method of forming a resistor in the back end of the line of amulti-layer integrated circuit comprising the steps of: providing alower layer having at least one lower metal interconnect and a lower ILDtop surface; forming a first ILD layer having a first ILD thickness anda first ILD top surface on said lower ILD top surface; forming on saidfirst ILD top surface a resistor having a resistor thickness and aresistor top surface and comprising at least a resistive layer and anetch-resistant resistor top cap layer above said resistive layer;forming a second ILD layer having a second ILD thickness substantiallyequal to said resistor thickness; planarizing said second ILD layer tosaid resistor top surface; forming a third ILD layer on said second ILDlayer; simultaneously forming a set of dual-damascene apertures formaking contact to at least some of said lower metal interconnects and aset of resistive contact apertures for making contact with said resistorin said third ILD layer; etching said set of resistive contact aperturesthrough said resistor cap layer, whereby the bottom of said resistivecontact apertures exposes said resistive layer; and simultaneouslyfilling said set of dual-damascene apertures and said resistive contactapertures with a conductor.
 2. A method according to claim 1, furthercomprising a step of forming a lower cap layer below said resistivelayer, said lower cap layer being adapted to block diffusion of saidresistive layer.
 3. A method according to claim 1, in which said step offorming said dual-damascene apertures and said resistive contactapertures includes a step of forming vias connecting interconnections inan upper part of said dual damascene apertures with said at least someof said lower metal interconnects while said resistive contact aperturesare exposed to an etchant, whereby said resistor top cap layer protectssaid resistor layer.
 4. A method according to claim 2, in which saidstep of forming said dual-damascene apertures and said resistive contactapertures includes a step of forming vias connecting interconnections inan upper part of said dual damascene apertures with said at least someof said lower metal interconnects while said resistive contact aperturesare exposed to an etchant, whereby said resistor top cap layer protectssaid resistor layer.
 5. A method according to claim 1, in which saidstep of etching said set of resistive contact apertures through saidresistor cap layer is performed simultaneously with a step of etchingthrough a lower ILD cap layer on said lower ILD top surface.
 6. A methodaccording to claim 2, in which said step of etching said set ofresistive contact apertures through said resistor cap layer is performedsimultaneously with a step of etching through a lower ILD cap layer onsaid lower ILD top surface.
 7. A method according to claim 3, in whichsaid step of etching said set of resistive contact apertures throughsaid resistor cap layer is performed simultaneously with a step ofetching through a lower ILD cap layer on said lower ILD top surface. 8.A method according to claim 1, in which said third ILD layer has adesign thickness equal to a design thickness of interconnects in saiddual-damascene apertures.
 9. A method according to claim 2, in whichsaid third ILD layer has a design thickness equal to a design thicknessof interconnects in said dual-damascene apertures.
 10. A methodaccording to claim 3, in which said third ILD layer has a designthickness equal to a design thickness of interconnects in saiddual-damascene apertures.
 11. A method according to claim 1, in whichsaid first ILD thickness and said resistor thickness have a combineddesign thickness equal to a design thickness of vias in saiddual-damascene apertures.
 12. A method according to claim 2, in whichsaid first ILD thickness and said resistor thickness have a combineddesign thickness equal to a design thickness of vias in saiddual-damascene apertures.
 13. A method according to claim 3, in whichsaid first ILD thickness and said resistor thickness have a combineddesign thickness equal to a design thickness of vias in saiddual-damascene apertures.
 14. A method according to claim 8, in whichsaid third ILD layer has a design thickness equal to a design thicknessof interconnects in said dual-damascene apertures.
 15. A methodaccording to claim 9, in which said third ILD layer has a designthickness equal to a design thickness of interconnects in saiddual-damascene apertures.
 16. A method according to claim 10, in whichsaid third ILD layer has a design thickness equal to a design thicknessof interconnects in said dual-damascene apertures.
 17. A layer in theback end of the line of a multi-layer integrated circuit comprising aset of dual-damascene interconnects and at least one resistor: a lowerlayer having at least one lower metal interconnect and a lower ILD topsurface; a first ILD layer having a first ILD thickness and a first ILDtop surface on said lower ILD top surface; a resistor formed on saidfirst ILD top surface having a resistor thickness and a resistor topsurface and comprising at least a resistive layer and an etch-resistantresistor top cap layer above said resistive layer; a second ILD layerhaving a second ILD thickness substantially equal to said resistorthickness and planarized to said resistor top surface; a third ILD layerformed on said second ILD layer; a set of dual-damascene interconnectsfor making contact to at least some of said lower metal interconnectsand a set of resistive contact members for making contact with saidresistor in said third ILD layer, said set of resistive contact membersextending through said resistor cap layer, whereby the bottom of saidresistive contact apertures makes direct contact with said resistivelayer.
 18. A layer according to claim 17, in which said third ILD layerhas a design thickness equal to a design thickness of interconnects insaid dual-damascene interconnects.
 19. A layer according to claim 17, inwhich said first ILD thickness and said resistor thickness combine to adesign thickness equal to a design thickness of vias in saiddual-damascene interconnects.
 20. A layer according to claim 18, inwhich said first ILD thickness and said resistor thickness combine to adesign thickness equal to a design thickness of vias in saiddual-damascene interconnects.